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Series  642   Control gate valve Area of application: For semiconductor, FPD and industrial processes, e. g. sputtering and etching systems. Description: Control gate valves with stepper motor for controlling and isolation. A valve in combination with an adaptive pressure controller PM4/5 is a pressure control system. Nominal inside diameters (ID): 160 (6" ) - 400 (16") Body material: Stainless steel Actuator types: Stepper motor Feedthrough: Rotary feedthrough Sealing technology: VATLOCK-System Sealing materials: Bonnet: FKM (VITON®) / Gate: FKM (VITON®) Cycles until first service: 200'000 cycles (DN400 horizontal mounting position only) Leak rate: Body: < 1 . 10-9 mbar ls-1 Valve seat: < 1 . 10-9 mbar ls-1 ID:  * 160 (6" ) 200 (8" ) 250 (10") 320 (12") 350 (14") 400 (16") Flange:  * ASA-150 lb/sqin (compatible with ANSI B. 16.5) ASA-LP (compatible with ANSI B. 16.5) CF-F fixed flange metric threads (compatible with ISO 3669 Fig.2) CF-F fixed flange UNF threads (compatible with ISO 3669 Fig.2) ISO-F (compatible with ISO 1609 Fig.1) JIS (compatible with JIS B 2290) Actuator:  * Stepper motor › Details Options Catalog pages Accessories Similar Products

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